水辅助激光诱导金属化实现聚合物表面高精度金属图案
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先进高分子材料全国重点实验室,四川大学高分子研究所,四川 成都 610065

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国家自然科学基金面上项目(52573230)


Water-Assisted Laser-Induced Selective Metallization Enabling High-Precision Metallic Patterning on Polymer Surfaces
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    摘要:

    针对传统激光诱导选择性金属化(LISM)在空气中加工聚合物时存在光热效应,导致活化线宽大于激光光斑尺寸、难以满足高精度与高分辨率电路制备需求的问题,提出了一种水辅助LISM策略。以丙烯腈-丁二烯-苯乙烯(ABS)/CuO·Cr?O?复合材料为研究对象,将水辅助策略与LISM技术相结合,探究了水下紫外激光活化的最佳参数。结果表明,水层能够有效抑制紫外激光活化过程中的热积累与热扩散,减小热影响区;通过对比水下和空气环境中的活化及化学镀铜结果,发现水辅助LISM所制备的铜层平整致密、精度更高,极限线宽由空气环境中的约40 μm降低至约水下的28 μm。机理分析揭示了水下激光活化诱导Cu2?还原为催化活性Cu?的作用机制。该方法显著提升了聚合物表面金属图案的精度与分辨率,为高集成度电路和微型电子器件的制备提供了新思路。

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    Conventional laser-induced selective metallization (LISM) of polymers in air often suffers from pronounced photothermal effects, causing the activation line width to exceed the laser spot size, which limitation severely hinders the fabrication of high-precision and high-resolution circuits. To address this issue, a water-assisted LISM strategy was proposed. Using acrylonitrile-butadiene-styrene (ABS)/CuO·Cr?O? composites as the research object, the optimal parameters for underwater ultraviolet (UV) laser activation were investigated by integrating this water-assisted strategy with LISM technology. The results demonstrate that the water layer effectively suppresses the thermal accumulation and thermal diffusion during the activation process of UV laser, thereby minimizing the heat-affected zone (HAZ). Comparative analysis of the activation and electroless copper plating results obtained in water and air reveals that the copper layer fabricated via water-assisted LISM is smoother, denser, and more precise. Notably, the narrowest line width is reduced from ~40 μm in air to ~28 μm underwater. Furthermore, mechanism investigations reveal that underwater laser activation induces the reduction of Cu2? to Cu?, forming active catalytic centers for subsequent electroless copper plating. This approach significantly improves the precision and resolution of metal patterns on polymer surfaces, providing a novel pathway for the fabrication of highly integrated circuits and miniaturized electronic devices.

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  • 收稿日期:2026-04-01
  • 录用日期:2026-04-30
  • 网络出版日期:2026-09-30
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