?-Methacryloyloxypropyltrimethoxysilane (KH-570)，methyltrimethoxysilane (MTMS) modified nano silica (SiO₂) was prepared by sol-gel method, vinyl terminated polysiloxane (V-PDMS) was prepared by ring opening reaction, then they were alone and together copolymerized with acrylate MMA and HEMA to prepare three polymers, and the polymer was coated on the polyethylene terephthalate (PET) film by pull impregnation. IR spectra show that V-PDMS and functionalized nano- SiO₂ were successfully prepared. The effects of the particle size and content of functionalized nano- SiO₂ and V-PDMS content on the surface properties of the PET films were studied. UV spectrophotometer and transmittance/haze tester show that the transmittance of the film is increased with the increase of SiO₂ and V-PDMS content; the contact angle measuring instrument shows that the water contact angle increases with the increase of the content of SiO₂ and V-PDMS. When the content of V-PDMS and SiO₂ in the copolymer is 40% and 1% respectively, the highest transmittance is 94.5%.